为了能够快速且大面积生长碳纳米纤维,研究碳纳米纤维的形成、转变及在各种物理、化学环境下的反应机理,应用等离子化学气相沉积(PECVD)方法,以CH4为反应气体,FeCl4为催化剂在玻璃衬底上生长碳纳米薄膜.应用扫描电镜(SEM)观察了碳纳米纤维薄膜的表面形貌,拉曼(Raman)光谱分析了碳纳米纤维的结构组成.结果表明,无催化剂时薄膜主要由纳米团簇构成,而催化作用下薄膜呈纤维状生长,纳米纤维为典型的碳纳米管石墨特征峰.在温度,气压,催化剂等反应条件中,FeCl2催化剂对碳纳米薄膜的取向生长起决定性作用,通过调节催化剂的浓度与分布,可有效改变碳纳米纤维的密度与分布.
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