采用多弧离子镀技术,用Ti-Al-Zr合金靶和Cr靶,在W18Cr4V高速钢基体上沉积了(Ti,Al,Zr,Cr)N多元膜,并进行了600℃,700℃,800℃和900℃短时(4 h)高温氧化实验及700℃和800℃长期(100h)高温循环氧化实验.用扫描电镜(SEM)、能谱(EDS)和X射线衍射(XRD)观察和分析样品表面氧化膜.结果表明,这种多元膜在短时(4 h)高温氧化条件下,800℃时仍具有良好的抗高温氧化性,XRD显示氧化膜主要为TiO2;在长期(100 h)高温氧化条件下,该多元膜的抗高温氧化温度大约为700℃左右.
参考文献
| [1] | Sathrum P;Coil B F .Plasma and deposition enhancement by modified arc evaporation source[J].Surface and Coatings Technology,1992,50(02):103-109. |
| [2] | Vetter J .Vacuum arc coatings for tools:potential and application[J].Surface and Coatings Technology,1995,76-77:719-724. |
| [3] | Mitsuo A.;Nihira N.;Iwaki M.;Uchida S. .Improvement of high-temperature oxidation resistance of titanium nitride and titanium carbide films by aluminum ion implantation[J].Surface & Coatings Technology,1998(0):98-103. |
| [4] | 马胜利,徐健,介万奇,徐可为,M.G.J.Veprek-Heijman,S.Veprek.PCVD制备Ti1-xAlxN硬质薄膜的结构与硬度[J].金属学报,2004(06):669-672. |
| [5] | Y. H. Lu;Y. G. Shen;Z. F. Zhou;K. Y. Li .Effects of nitrogen content on microstructure and oxidation behaviors of Ti-B-N nanocomposite thin films[J].Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films,2006(2):340-349. |
| [6] | 赵时璐,李友,张钧,王闯,刘常升.刀具氮化物涂层的研究进展[J].金属热处理,2008(09):99-104. |
| [7] | 谢致薇,白晓军,蒙继龙,谢光荣,胡社军.（TiFeCr）N多元膜的氧化行为[J].中国有色金属学报,2001(06):1064-1068. |
| [8] | A. Raveh;M. Weiss;R. Shneck .Optical emission spectroscopy as a tool for designing and controlling the deposition of graded TiAlN layers by ECR-assisted reactive RF sputtering[J].Surface & Coatings Technology,1999(2/3):263-268. |
| [9] | Mitsuo A.;Nihira N.;Iwaki M.;Uchida S. .Improvement of high-temperature oxidation resistance of titanium nitride and titanium carbide films by aluminum ion implantation[J].Surface & Coatings Technology,1998(0):98-103. |
| [10] | Shum PW;Li KY;Zhou ZF;Shen YG .Structural and mechanical properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering[J].Surface & Coatings Technology,2004(2/3):245-253. |
| [11] | Luo Q;Rainforth W M;Munz W D .Wear mechanisms of monolithic and multi-component nitride coatings grown by combined arc etching and unbalanced magnetron sputtering[J].Surface and Coatings Technology,2001,146-147:430-435. |
| [12] | Jun Zhang,Li Li,Lipeng Zhang,Shilu Zhao,Qiang Guo.Composition demixing effect on cathodic arc ion plating[J].北京科技大学学报（英文版）,2006(02):125-130. |
| [13] | Jun ZHANG,Yu ZHANG,Li LI,Guoqiang LIN,Chuang DONG.Approximate Design of Alloy Composition of Cathode Target[J].材料科学技术学报(英文版),2006(05):639-642. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%