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研究了Ti/Ni/Ti复合层TLP扩散连接Si3N4陶瓷。结果表明,Ni-Ti过渡液相存在时间短,在此期间形成的界面结合强度低;必须进一步固态扩散反应才能形成高强度接头,相应的接头显微结构为:Si3N4/TiN/Ti5Si3+Ti5Si4+Ni3Si/NiTi/Ni3Ti/Ni。连接时间、连接温度、连接压力及Ti和Ni的厚度影响接头组织和强度,其最佳值为60min,1050℃、2.5MPa、20μm和400μm,所得接头室温和800℃剪切强度分别为142MPa和61MPa。

TLP diffusion bonding of Si3 N4 ceramics with Ti/Ni/Ti multilayer was investigated. The existing time of Ni-Ti transient liquid phase is short, and the strength of the interface formed within this duration is very low. The formation of strong joints needs further solid-state diffusion reaction, and its microstructures is Si3N4/TiN/TisSi3 + TisSi4 + Ni3Si/NiTi/Ni3Ti/Ni. The joints' strength is affected by bonding parameters, which include bonding time、bonding temperature、bonding presssure、thickness of Ti or Ni. The shear strength of joints at room temperature and 800℃ could reaches 142MPa and 61MPa, respectively.

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