利用TiCl4-BCl3 -H2-Ar反应体系,用化学气相沉积法(CVD)在石墨基体上沉积了TiB2涂层,并对涂层的物相、沉积速率、微观结构、表面形貌进行了分析.结果表明:沉积的涂层物相由TiB2组成.随着沉积温度的提高,沉积速率加快,涂层的显微硬度先增加后降低,950℃时达到最大值.沉积温度的升高,TiB2涂层颗粒尺寸明显增大,在900℃～950℃范围内能沉积出结构致密、颗粒尺寸适合的TiB2涂层.分析了TiB2涂层的沉积机理.
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