通过射频磁控溅射法在Si(100)基片上沉积了La0.9 Ba0.1MnO3-δ(IJBMO)薄膜,并得到在不同温度下退火后的薄膜.采用X射线衍射(XRD),扫描隧道显微镜(STM),X射线光电子能谱(XPS),四探针法等手段对退火后薄膜的结构、微结构、表面化学态、磁电阻等性质进行了系统研究,结果表明,薄膜在800～850℃温度范围内退火,形成单相结构且晶粒与基片之间存在着相对固定的外延关系.退火温度不同会引起薄膜中含氧量的不同.在温度为300K,磁场为1.5T的条件下,退火温度为850℃的薄膜样品磁电阻可高达30%.
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