利用电弧离子镀技术在TC4基体上制备CrNx薄膜,研究了脉冲偏压对薄膜的组织结构和力学性能的影响.结果表明,在一定范围内提高脉冲偏压可以显著减少薄膜表面熔滴的数量及尺寸,改善表面平整度,获得高质量的薄膜;同时随着脉冲偏压的升高,CrNx薄膜由CrN单相变为Cr,Cr2N和CrN三相组成,硬度与结合强度的峰值可分别达到24294.2MPa和43N;薄膜的摩擦系数在偏压幅值为-300V时具有最小值0.43.
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