采用磁控溅射方法,在石英衬底E制备了光电性能优良的ZnO紫外探测器.通过紫外光电性能测试、扫描电子显微镜(SEM)观察及X射线衍射(XRD)分析,研究了ZnO紫外探测器的光电特性.结果表明:探测器的光电流高出暗电流近3个数量级,紫外波段的光响应高出可见光波段近2个数量级,所制备ZnO紫外探测器达到了高辐射灵敏度和可见盲特性的要求.
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