采用中频脉冲磁控溅射双靶交替沉积,制备了调制周期为4nm,12nm和88nm的VC/Ni纳米叠层薄膜以及纯VC薄膜.利用XRD和SEM对薄膜结构进行分析,并通过纳米压痕和维氏压痕对薄膜的硬度、模量以及韧性进行了表征.结果表明:双靶交替沉积制备的VC/Ni纳米叠层薄膜界面清晰、薄膜生长比较致密;三种周期的叠层薄膜硬度均为20GPa,与纯VC薄膜相比韧性得到了明显的改善;随着调制周期的增加,发现VC/Ni纳米叠层薄膜的硬度先增大后减小,韧性先降低,后提高,存在一个性能转折的临界周期.
参考文献
| [1] | OTANI S;TANAKA T;ISHIZAWA Y .Electrical resistivities in single crystals of TiCx and VCx[J].Journal of Materials Science,1986,21(3):1011-1014. |
| [2] | BERNDT H;ZENG A Q;STOCK H R et al.Vanadium carbide films produced by plasma-assisted metal-organic chemical vapour deposition[J].Journal de Physique IV,1993,3:313-320. |
| [3] | AOUNI A;WEISBECKER P;LOI T H et al.Search for new materials in sputtered V1-xCx films[J].THIN SOLID FILMS,2004,469/470:315-321. |
| [4] | Liao MY;Gotoh Y;Tsuji H;Ishikawa J .Deposition of vanadium carbide thin films using compound target sputtering and their field emission[J].Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films,2005(5):1379-1383. |
| [5] | Ferro D;Rau JV;Generosi A;Albertini VR;Latini A;Barinov SM .Electron beam deposited VC and NbC thin films on titanium: Hardness and energy-dispersive X-ray diffraction study[J].Surface & Coatings Technology,2008(10):2162-2168. |
| [6] | Aguzzoli, C.;Figueroa, C.A.;de Souza, F.S.;Spinelli, A.;Baumvol, I.J.R. .Corrosion and nanomechanical properties of vanadium carbide thin film coatings of tool steel[J].Surface & Coatings Technology,2012(10):2725-2731. |
| [7] | 杨森,钟敏霖,刘文今.激光熔覆制备原位自生TiC颗粒强化Ni基合金复合涂层的研究[J].航空材料学报,2002(01):26-30. |
| [8] | Kim BI.;Guenard R.;Torres LCF.;Perry SS.;Frantz P.;Didziulis SV.;Lee S. .Chemical modification of the interfacial frictional properties of vanadium carbide through ethanol adsorption[J].Surface Science: A Journal Devoted to the Physics and Chemistry of Interfaces,2001(1/3):185-197. |
| [9] | R. Teghil;A. De Bonis;A. Galasso;P. Villani;A. Santagata;D. Ferro;S.M. Barinov .Nanostructured Thin Films Obtained By Ultra-short Pulse Laser Deposition Of Vanadium Carbide[J].Applied Surface Science,2009(10):5220-5223. |
| [10] | 沈洁,李冠群,李玉阁,李戈扬.靶成分和溅射参数对碳化钒薄膜微结构与力学性能的影响[J].无机材料学报,2012(05):536-540. |
| [11] | 龚海飞,邵天敏.TiN/Ti多层膜韧性对摩擦学性能的影响[J].材料工程,2009(10):26-31. |
| [12] | LARSSON M;BROMARK M;HEDENQVIST P et al.Deposition and mechanical properties of multilayered PVD Ti/TiN coatings[J].Surface and Coatings Technology,1995,76/77:202-205. |
| [13] | BULL S J;JONES A M .Multilayer coatings for improved performance[J].Surface and Coatings Technology,1996,78(1/2/3):173-184. |
| [14] | Wang X;Kolitsch A;Moller W .Roughness improvement and hardness enhancement in nanoscale Al/AlN multilayered thin films[J].Applied physics letters,1997(14):1951-1953. |
| [15] | M. Berger;U. Wiklund;M. Eriksson;H. Engqvist;S. Jacobson .The multilayer effect in abrasion -- optimising the combination of hard and tough phases[J].Surface & Coatings Technology,1999(0):1138-1144. |
| [16] | Duck A.;Gesatzke W.;Griepentrog M.;Osterle W.;Sahre M. Urban I.;Gamer N. .Ti/TiN multilayer coatings: deposition technique, characterization and mechanical properties[J].Surface & Coatings Technology,2001(0):579-584. |
| [17] | J.M.LACKNER;W.WALDHAUSER;L.MAJOR .Nanocrystalline Cr/CrN and Ti/TiN multilayer coatings produced by pulsed laser deposition at room temperature[J].Bulletin of the Polish Academy of Sciences. Technical Sciences,2006(2):175-180. |
| [18] | LACKNER J M .Industrially-scaled room-temperature pulsed laser deposition of Ti-TiN multilayer coatings[J].Journal of Physics:Conference Series,2007,59:16-21. |
| [19] | K. Chu;Y. G. Shen .Mechanical and tribological characterisation of nanostructured Ti/TiB_2 multilayer films[J].Surface Engineering,2008(6):402-409. |
| [20] | SHIH K K;DOVE D B .Ti/Ti-N Hf/Hf-N and W/W-N multilayer films with high mechanical hardness[J].Applied Physics Letters,1992,61(6):654. |
| [21] | MOVCHAN B A;DEMCHISHIN A V;BADILENKO G.F et al.Structure-property relationships in microlaminate TiC/TiB2 condensates[J].THIN SOLID FILMS,1982,97:215-219. |
| [22] | SANS C;DESHPANDEY C;DOERR H J et al.Preparation and properties of TiC/Ni microlaminates[J].THIN SOLID FILMS,1983,107(4):345-351. |
| [23] | CHU X;WONG M S;SPROUL W D et al.Mechanical properties and microstructures of polycrystalline ceramic/metal superlattices:TiN/Ni and TiN/Ni0.9Cr0.1[J].Surface and Coatings Technology,1993,61(1/2/3):251-256. |
| [24] | LIU C H;LI W Z;LI H D .Structure and hardness enhancement of Fe/TiC multilayered films[J].Nuclear Instruments and Methods in Physics Research Section B:Beam Interactions with Materials and Atoms,1995,95(3):323-326. |
| [25] | Ziebert C;Ulrich S .Hard multilayer coatings containing TiN and/or ZrN: A review and recent progress in their nanoscale characterization[J].Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films,2006(3):554-583. |
| [26] | Kim, YJ;Byun, TJ;Lee, HY;Han, JG .Effect of bilayer period on CrN/Cu nanoscale multilayer thin films[J].Surface & Coatings Technology,2008(22/23):5508-5511. |
| [27] | EUSTATHOPOLOS N;NICHOLAS M G;DREVET B.Wettability at High Temperatures[M].Pergamon Press New York,1999:308. |
| [28] | Rincon C.;Romero J.;Esteve J.;Martinez E.;Lousa A. .Effects of carbon incorporation in tungsten carbide films deposited by rf magnetron sputtering: single layers and multilayers[J].Surface & Coatings Technology,2003(0):386-391. |
| [29] | Philip C. Yashar;William D. Sproul .Nanometer scale multilayered hard coatings[J].Vacuum,1999(3/4):179-190. |
| [30] | Ming Kong;Nan Shao;Yunshan Dong .Growth, microstructure and mechanical properties of (Ti, Al)N/VN nanomultilayers[J].Materials Letters,2006(7):874-877. |
| [31] | Madan A.;Barnett SA.;Engstrom C.;Ljungcrantz H.;Hultman L. Grimsditch M.;Wang YY. .Enhanced mechanical hardness in epitaxial nonisostructural Mo/NbN and W/NbN superlattices[J].Journal of Applied Physics,1998(2):776-785. |
| [32] | 田民波;李正操.薄膜技术与薄膜材料[M].北京:清华大学出版社,2011:154. |
| [33] | Zhang S.;Sun D.;Fu YQ.;Du HJ. .Recent advances of superhard nanocomposite coatings: a review[J].Surface & Coatings Technology,2003(2/3):113-119. |
| [34] | KOEHLER J .Attempt to design a strong solid[J].Physical Review B,1970,2:547-551. |
| [35] | Li, Y.;Li, G. .Coherent growth and superhardness effect in VC/Si_3N_4 nanomultilayers[J].Surface & Coatings Technology,2011(13/14):3881-3884. |
| [36] | HAUERT R;PATSCHEIDER J .From alloying to nanocomposites-improved performance of hard coatings[J].Advancde Engineering Materials,2000,2:247-259. |
| [37] | Zhang S;Sun D;Fu YQ;Du HJ .Toughness measurement of thin films: a critical review[J].Surface & Coatings Technology,2005(1/3):74-84. |
| [38] | 刘美华 .压痕硬度测试中的力学问题研究[D].天津大学,2007. |
| [39] | MA K J;BLOYCE A;BELL T .Examination of mechanical properties and failure mechanisms of TiN and Ti? TiN multilayer coatings[J].Surface and Coatings Technology,1995,76/77:297-302. |
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