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用电子束蒸发方法制备了多晶NiMnGa薄膜.用Ni52Mn26Ga22合金作靶材,衬底为<111>取向的单晶硅抛光面.沉积时衬底温度为773K.电子束蒸发在本底真空3×10-3Pa中进行.X射线衍射图谱表明薄膜在室温下为奥氏体相.电阻随温度的变化关系表明薄膜的马氏体相变开始温度约在256K,且相变滞后较小.在室温下的奥氏体具有正的磁电阻效应,在1T磁场下磁电阻为0.06%.马氏体的磁电阻很小,这种差异来源于电子结构的不同.

参考文献

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