在康宁玻璃上用真空蒸镀法沉积NiFeSiMnMo/Cu/NiFeSiMnMo多层膜,对所沉积单层膜的软磁性能随膜厚的变化和多层膜的巨磁阻抗效应随磁性层(NiFeSiMnMo)厚度的变化进行分析.实验结果表明:NiFeSiMnMo单层膜随厚度的增加,矫顽力增大,软磁性能变差;退火后的多层膜的纵向巨磁阻抗比(GMI ratio)的最大值随磁性层NiFeSiMnMo的厚度增加而增加.
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