为了将薄膜本征硬度从所测复合硬度中提取出来,目前有很多计算或描述的模型和方程.本文介绍了目前提出的计算薄膜硬度的方法和模型,对各方法和模型进行了分析比较,并对其未来发展方向进行了展望.
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