阐述了液相法中制备超薄功能膜的新方法--连续离子层吸附反应法(Successive Ionic Layer Adsorption and Reaction, SILAR).探究了它的薄膜生长机理、工艺参数影响以及应用现状,指出了尚需深入研究的问题.
参考文献
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