与蓝宝石衬底相比,硅衬底具有低成本、大面积、高质量、导电导热性能好等优点,普遍认为使用Si片作GaN薄膜衬底有可能实现光电子和微电子的集成,因此Si基GaN的研究受到了广泛关注.本文回顾了Si衬底GaN基LED的研究进展, 同时简要介绍了在Si衬底上制备GaN基LED的实验结果,及研制出工作电压为3.6 V、串联电阻为31 Ω、输出功率近1 mW的Si衬底GaN基蓝光LED.
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