采用溶胶-凝胶工艺在普通玻璃片上制备了ZnO∶Al薄膜.通过XRD、UV透射谱和电学测试等分析方法研究了掺Al对薄膜的组织结构和光电性能的影响.分析表明:所制备的薄膜具有c轴择优取向,随着掺Al浓度的增加,(002)峰向低角度移动,峰强逐渐减弱.薄膜电阻率随掺Al浓度变化,当掺Al浓度为1.5 %(摩尔分数),薄膜电阻率降至6.2×10-4 Ω·cm.掺Al量的增加同时使得薄膜的禁带宽度变大,光吸收边出现蓝移现象.
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