利用电化学沉积法,以65±1 ℃的0.1 mol/L Zn(NO3)2水溶液作为电解质溶液,在方块电阻为118 Ω/□的氧化铟锡(ITO)玻璃基板上制备了ZnO薄膜.利用扫描电镜观察了ZnO薄膜表面形貌,结果表明随着电极电势的降低或沉积时间的增加,ZnO薄膜表面颗粒的六方形结构逐渐明显.利用X射线衍射技术分析了阴极电势和沉积时间对ZnO薄膜择优取向的影响,结果表明ZnO薄膜的(002)择优取向是随电极电势的下降而逐渐减弱的,而且随沉积时间的增加(002)择优取向也逐渐减弱.透射光谱测量表明,实验所获得的ZnO薄膜在可见光范围内是透光的,平均透过率高达80%～90%,不同阴极电势下的禁带宽度均为3.5 eV左右,且在阴极电势为-2.5 V时,禁带宽度随沉积时间的增加而逐渐减小.
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