采用大功率高重复频率准分子激光溅射热解石墨靶制备了类金刚石膜,研究了激光功率密度和重复频率对类金刚石膜的结构及场发射性能的影响.保持重复频率不变,提高激光功率密度可提高膜中sp3键碳的含量和膜的场发射性能;在最佳激光功率密度下,当重复频率由200 Hz提高到500 Hz,膜中sp3键碳的含量和膜的场发射性能先提高,后降低,在300 Hz时达到最佳.在300 Hz重复频率、1010W/cm2激光功率密度下.膜的发射阈值电场为26 V/μm,在34 V/μm的电场下测得电流密度为14μA/cm2.根据类金刚石膜的场发射机理对上述结果进行了分析解释.
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