采用半导体光刻技术在硅衬底上获得图形化掩膜,然后用热化学气相淀积(T-CVD)的方法制备了图形化的碳纳米管线阵列,用扫描电镜和拉曼光谱仪对碳纳米管进行了表征.研究了图形化碳纳米管线阵列的场发射特性,并与无图形化处理的碳纳米管薄膜样品的场发射特性进行了比较.当发射电流密度达到10 μA/cm2时,无图形化处理的碳纳米管薄膜、10 μm碳纳米管线阵列以及2 μm碳纳米管线阵列样品的开启电场分别为3 V/μm、2.1 V/μm和1.7 V/μm;而当电场强度达3.67 V/μm时,相应的电流密度分别为2.57 mA/cm2、4.65 mA/cm2和7.87 mA/cm2. 实验结果表明,图形化处理后的碳纳米管作为场发射体,其场发射特性得到了明显的改善.对改善的原因进行了分析和讨论.
参考文献
| [1] | Heer W A de,Chatelain A,Ugarte D.A carbon nanotube field-emission electron source[J].Science,1995,270(5239):1179-1180. |
| [2] | Yu M F,Lourie O,Dyer M J,et al.Strength and breaking mechanism of multiwalled carbon Nanotubes under tensile load[J].Science,2000,287(5453):637-640. |
| [3] | Osman M A,Srivastava D.Temperature dependence of the thermal conductivity of single-wall carbon nanotubes[J].Nanotechnology,2001,21(1):21-24. |
| [4] | Henk W,Postma C H,Teepen T,et al.Carbon nanotube single-electron transistors at room temperature[J].Science,2001,293(5527):76-79. |
| [5] | Martel R,Schmidt T,Shea H R,et al.Single-and multi-wall carbon nanotube field-effect transistors[J].Appl.Phys.Lett.,1998,73(26):2447-2449. |
| [6] | YE Y,Ahn C C,Witham C,et al.Hydrogen adsorption and cohesive energy of single-walled carbon nanotubes[J].Appl.Phys.Lett.,1999,74(19):2307-2309. |
| [7] | Kong J,Franklin N R,Zhou C,et al.Nanotube Molecular Wires as Chemical Sensors[J].Science,2000,287(5453):622-625. |
| [8] | Sugie H,Tanemura M,Filip V,et al.Carbon nanotubes as electron source in an x-ray tube[J].Appl.Phys.Lett.,2001,78(23):2578-2580. |
| [9] | Yuang Guang,Cao Chonglong,Song Cuihua,et al.Simulation of electron energy distribution of n type Si emitter[J].Chin.J.Lumin.,2008,29(3):557-560. |
| [10] | Nilsson L,Groening O,Emmenegger C,et al.Scanning field emission from patterned carbon nanotube films[J].Appl.Phys.Lett.,2000,76(10):2071-2073. |
| [11] | Shunjiro Fujii,Shin-ichi Honda,Hironobu Machida,et al.Efficient field emission from an individual aligned carbon nanotube bundle enhanced by edge effect[J].Appl.Phys.Lett.,2007,90(15):153108-153120. |
| [12] | Cheol J L,Jeunghee P.Growth and structure of carbon nanotubes produced by thermal chemical vapor deposition[J].Carbon,2001,39(12):1891-1896. |
| [13] | Küttel O m,Grning O,Emmenegger C H,et al.Field emission from diamond,diamond-like and nanostructured carbon films[J].Carbon,1999,37(5):745-752. |
| [14] | Dong C K.Field emission based sensors using carbon nanotubes[D].USA:Old Dominion University,2003. |
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