采用射频磁控溅射法在玻璃衬底上制备了高质量的Ga掺杂ZnO透明导电薄膜(GZO).通过X射线衍射、原子力显微镜、四探针电导率测试仪等表征方法研究了溅射气压对薄膜结晶特性及导电性能的影响.所制备的GZO薄膜是具有六角纤锌矿结构的多晶薄膜,最佳择优取向为(002)方向.随着溅射气压的增大,薄膜方块电阻与薄膜电阻率均随之增大.最小方块电阻可达17.6 Ω/□,最小薄膜电阻率为7.3×10~(-4) Ω·cm.另外,GZO薄膜在可见光范围内的透过率达到了90%以上.
Highly conducting and transparent gallium doped zinc oxide (GZO) thin films had been deposited by r.f. magnetron sputtering method on glass substrates. The dependence of GZO films crystal and conducting properties on argon gas pressure was investigated by X-ray diffraction (XRD), atomic force microscopy (AFM) and four point probe methods. The obtained GZO films were polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. As argon gas pressure increased, the sheet resistance and resistivity both increased with the lowest value of 17.6 Ω/□ and 7.3×10~(-4) Ω·cm, respectively. In addition, the transmittance of the GZO films in the visible range was over 90%.
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