微型泵在生物化学分析、药物输送和芯片冷却等领域有广阔的应用前景。为了确定热驱动薄 膜式微泵达到最大工作效率的工作条件，对泵的温度响应和振动响应进行数值模拟，分别得到五种 加热功率下微泵的流率－频率曲线，效率－频率曲线以及微泵的最佳效率曲线。发现微泵的流率在 4～ 5Hz达到最大，当加热功率大于 2W时，微泵的流量不再显著增加；微泵在加热功率为 1W时的效 率最大，最佳工作条件是加热功率 1W、加热频率 5Hz，此时微泵的效率为 32.54μ l/min· W。
Micropump used as actuator of microfluid device is an important part of micro－ electro－ mechanical systems (MEMS). The micropump was simulated as whole to optimize the work condition. Simulation results were presented for the flow rate versus frequency and the efficiency versus frequency. The simulation results show that the micropump has a maximum flow rate at 4－ 5 Hz, if the input power is greater than 2W the flow rate does not increase markedly, the micropump show the highest efficiency 32.54μ l/min· W at 1W as input power and 5Hz as input frequency.
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