介绍了一种低量程高线性压阻式微机械加速度传感器的设计、工艺制作和封装 ,还较详细地 介绍了静态和动态特性的测量和结果。为提高灵敏度，传感器采用悬臂梁结构。本文对结构的固有 横向效应进行了计算，结果表明此种结构的三种横向效应主要是由于质量块（岛）质心偏离梁中平面， 沿梁伸展方向（ x向）惯性力分量产生的弯矩所致。提出了调整上下盖板与中间质量块之间的气隙改 善器件频响特性的方法。报道的压阻式微机械加速度传感器量程± 1g(g为重力加速度 )，线性度优 于 0.05％，灵敏度约 1mV/gV，阻尼比 0.7，带宽 110Hz。
A kind of high linearity piezoresistive micromachining accelerometer with low range is reported on its mechanism, structure, fabrication processing and performance test. To improve its sensitivity, this sensor adopt cantilever beam－ island structure. After theoretical calculation, it can be concluded that because the center of mass isn't in central plane, inertial force will produce bending stress in piezoresis－ tance, that is the main source of transverse sensitivity. And for the sensor frequency character, damping factor can be modifed by changing air gap between cover board and sensing element.
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