采用热丝化学气相沉积法,以铁作为催化剂,在较低的衬底温度合成纳米SiC薄膜.铁粒子是在400Pa氢气的气氛中,通过用脉冲激光烧蚀铁靶5min引入的.用扫描电镜和拉曼谱对样品进行了分析.扫描电镜观察到了直径为10-30nm,长度短于1μm的无序SiC棒.拉曼谱中的横向生子模式的红移表明生长方向的限制效应.所有这些说明Fe粒子的大小将影响到SiC棒的生长.
SiC films were synthesized using hot filament chemical vapor deposition with Fe as catalyst at low substrate temperature. Fe particles were introduced via Fe bulk ablated by pulse- laser deposi- tion in hydrogen ambience of 400Pa. SiC films were characterized by scan electrical morphology (SEM) and Raman spectra. SEM Results show that these SiC nanorods are 10- 30nm in diameter and less than 0.5μ m in length random aligned in the film. The red shift of the TO phonon mode of the SiC in the Raman spectra indicate the size confinement effect in the growth direction. All these reveal that the size of the Fe particles affects the growth of nanorods.
参考文献
| [1] | Dai H;Wong E W;Lu Y Z et al.[J].Nature,1995,375:769. |
| [2] | Han WQ.;Li QQ.;Liang WJ.;Gu BL.;Yu DP.;Fan SS. .CONTINUOUS SYNTHESIS AND CHARACTERIZATION OF SILICON CARBIDE NANORODS[J].Chemical Physics Letters,1997(3-5):374-378. |
| [3] | Zhou X T;Wang N;Lai H L;Peng H Y et al.[J].Applied Physics Letters,1999,74:3942. |
| [4] | 阎研,黄福敏,张树霖,朱邦芬,尚尔轶,范守善.SiC纳米棒光学声子的喇曼光谱[J].半导体学报,2001(06):726-728. |
| [5] | Lai HL.;Zhou XT.;Peng HY.;Au FCK.;Wang N.;Bello I.;Lee CS. Lee ST.;Duan XF.;Wong NB. .Straight beta-SiC nanorods synthesized by using C-Si-SiO2[J].Applied physics letters,2000(3):294-296. |
| [6] | Betunme D S;Kiang C H;Vries de M S et al.[J].Nature,1993,363:605. |
| [7] | Jung Inn Sohn;Chel- Jong Choi;Seonghoon Lee et al.[J].Applied Physics Letters,2001,78:3310. |
| [8] | Jung Inn Sohn;Chel- Jong Choi;Seonghoon Lee et al.[J].Applied Physics Letters,2001,78:3310. |
| [9] | Tsuyoshi Yoshitake;Tatsuay Nagamoto;Kunihito Nagayama .Microstructure of β-FeSi{sub}2 thin films prepared by pulsed laser deposition[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2001(2):236-243. |
| [10] | Feng S Q;Yu D P;Zhang H Z et al.[J].中国科学,1999,29:921. |
| [11] | Lai HL.;Zhou XT.;Peng HY.;Au FCK.;Wang N.;Bello I.;Lee CS. Lee ST.;Duan XF.;Wong NB. .Straight beta-SiC nanorods synthesized by using C-Si-SiO2[J].Applied physics letters,2000(3):294-296. |
| [12] | Alfredo M Morales;Charles M Lieber .[J].Science,1998,279:208. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%