利用离面双弯曲过滤阴极真空电弧沉积系统,在Φ 200 mm单晶硅片上制备四面体非晶碳薄 膜.利用 Dectek3型表面轮廓仪检验膜厚均匀性(小于 5%),并利用扫描电子显微镜( SEM)、原子力 显微镜( AFM)、激光拉曼光谱( Raman)、 X射线光电子谱( XPS)以及纳米压痕( Nano- Indenter)仪器 测试薄膜的性能和结构.结果表明:试验制备的薄膜是四面体非晶碳薄膜 , 其中 sp3键含量高达 80%以上, 薄膜表面纯净, 几乎没有大颗粒的污染, 表面粗糙度( Rq)小于 0.3 nm(取样面积 1μ m2), 薄膜硬度可达 50 GPa,杨氏弹性模量高于 550 GPa.
参考文献
| [1] | Robertson J .Diamond- like amorphous carbon[J].Materials Science and Engineering,2002,R37:129-281. |
| [2] | Y. Lifshitz .Diamond-like carbon -- present status[J].Diamond and Related Materials,1999(8-9):1659-1676. |
| [3] | Jacob W;Moller W .On the structure of thin hydrocarbonfilms[J].Applied Physics Letters,1993,63(13):1771-1773. |
| [4] | Q.Wei;J.Narayan .Superhard Diamondlike carbon: preparation, theory, and properties[J].International Materials Reviews,2000(4):133-164. |
| [5] | 梁风,严学俭.类金刚石薄膜的性质、应用及制备[J].物理学报,1999(06):1095-1102. |
| [6] | Mckenzie D R .Tetrahedral amorphous carbon[J].Rep Rrog Phys,1996,59:1611. |
| [7] | Shi X.;Shi J.R.;Sun Z.;Tay B.K.;Cheah L.K. .On the upper limit of sp3 content in tetrahedral amorphous carbon film[J].Journal of Physics. Condensed Matter,1999(1):185-189. |
| [8] | Shi Xu;L. K. Cheah;B. K. Tay .Spectroscopic ellipsometry studies of tetrahedral amorphous carbon prepared by filtered cathodic vacuum arc technique[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1998(1/2):160-169. |
| [9] | Fallon P J;Veerasamy V S;Davis C A et al.Properties offiltered- ion- beam- deposited diamondlike carbon as afunction of ion energy[J].Physical Review B,1993,48:4777-4782. |
| [10] | Mckenzie D R;Muller D;Pailthorpe B A .Compressive- stress- induced formation of thin- film tetrahedral amor- phous carbon[J].Physical Review Letters,1991,67(06):773-776. |
| [11] | Gorokhovsky V I;Bhattacharya R;Bhat D G .Charac- terization of large area filtered arc deposion technology:Plasma processing parameters[J].Surface and Coatings Technology,2001,140:82-92. |
| [12] | Salo J;Lappalainen R;Anttila A .Energies of carbonplasma beams in the deposition of diamond- like coatings with the pulsed- arc- discharge method[J].Applied Physics A:Materials Science and Processing,1995,61:353-355. |
| [13] | Xu S.;Tan HS.;Zhong L.;Tu YQ.;Silva SRP.;Milne WI.;Tay BK. .PROPERTIES OF CARBON ION DEPOSITED TETRAHEDRAL AMORPHOUS CARBON FILMS AS A FUNCTION OF ION ENERGY[J].Journal of Applied Physics,1996(9):7234-7240. |
| [14] | 过滤式阴极电弧沉积类金刚石薄膜的特性分析[J].航空学报,1999(02):144. |
| [15] | Tamor M A;Vassell W C .Raman " fingerprinting" ofamorphous carbon films[J].Journal of Applied Physics,1994,76(06):3823-3830. |
| [16] | Schwan J.;Batori V.;Ehrhardt H.;Silva SRP.;Ulrich S. .RAMAN SPECTROSCOPY ON AMORPHOUS CARBON FILMS[J].Journal of Applied Physics,1996(1):440-447. |
| [17] | Yoshikawa M;Katagirl G;Ishida H et al.Raman spectraof diamondlike amorphous carbon films[J].Journal of Applied Physics,1988,64(11):6464-6468. |
| [18] | Stanishevsky A V et al.On correlation between the shapeof Raman spectra and short- range order structure of hydrogen- free amorphous carbon films[J].Diamond and Related Materials,1997,6:1026-1030. |
| [19] | Tay B.K.;Tan H.S.;Chua Daniel H.C.;Shi X. .Investigation of tetrahedral amorphous carbon films using X-ray photoelectron and Raman spectroscopy[J].Surface and Interface Analysis: SIA: An International Journal Devoted to the Development and Application of Techniques for the Analysis of Surfaces, Interfaces and Thin Films,1999(1):231-234. |
| [20] | Jackson ST.;Nuzzo RG. .DETERMINING HYBRIDIZATION DIFFERENCES FOR AMORPHOUS CARBON FROM THE XPS C 1S ENVELOPE[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,1995(2):195-203. |
| [21] | Moulder J F;Stickle W F;Sobol P E.Handbook ofX- ray photoeletron spectroscopy[M].Perkin- Elmer Eden Prairie MN,1992 |
| [22] | 吴瑜光,张通和,张荟星,张孝吉,王广甫.磁过滤阴极真空弧沉积薄膜研究[J].微细加工技术,2001(01):45-49. |
| [23] | Liu E;Shi X;Tan H S et al.The effect of nitrogen on themechanical properties of tetrahedral morphous carbon filmsdeposited with a filtered cathodic vacuum arc[J].Surface and Coatings Technology,1999,120-121:601-606. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%