重点介绍器件进入纳米尺度后出现的 MOSFET/SOI器件的新结构,如超薄 SOI器件、双栅 MOSFET、 FinFET和应变沟道等 SOI器件,并对它们的性能进行了分析.
参考文献
| [1] | International Technology Roadmap for semiconductor SIA[M].,2001 |
| [2] | Wong H S P .Beyond the conventional transistor[J].IBM Journal of Research and Development(46):133-168. |
| [3] | 林成鲁.SOI技术的新进展[J].功能材料与器件学报,2001(01):1-6. |
| [4] | Kevin Teixeira .Intal's Terahertz Transistor Architecture[EB/OL].http://www.intel com/research/silicon/spotlights/terahertzbkgdr htm,2002. |
| [5] | Gerald Marcyk;Robert Chau .New Transistor for 2005 andBeyond[EB/OL].www.intelcom/research/silicon/terahertzlongpdf,2003. |
| [6] | Robert Chau;Tack Kavalieros;Brain Doyle et al.A 50nmdepleted-ubstrate CMOS transistor (DST)[EB/OL].http://www.intel com/research/silicon/DST paper pdf,2003. |
| [7] | Lochtefeld A;Meinhold M;Langdo T .CMOS Technology for 25nm Channel Length[EB/OL].http://www.-tlmitedu/mtlhome/6Res/AR2002/03_elec/002_cmostetfnmchlepdf |
| [8] | Jvi-song Lin;Shih-hangChang.Recessed Multi-ate SOI MOSFET in deep decanonometer Regime[A].:47-48. |
| [9] | Ritenour A;Lauer I .Self-ligned Double-ate CMOS Technology for 3- integration[EB/OL].http://www.tlmitedu/mtlhome/6Res/AR2000BED/EDabs3pdf,2002. |
| [10] | Xue-ue Huang;Wen-hin Lee;Charles Kuo .Sub-50nm P-hannel FinFET[J].IEEE Transactions on Electron Devices,2001,48(05):880-886. |
| [11] | Stephen H Tang;Leland Chang;Nick Lindert et al.FinFET- Quasi-lanar double-ate MOSFET ISSCC2001/SESSION 7/Technology directions: AdvancedTechnologies/7 4[EB/OL].http://www-evice eccs berkeley edu/～ leland/publications/isscco pdf,2003. |
| [12] | Michael I Current;Shari N Farrens.Atomic-ayerCleaving with SixGey strain layers for fabrication of Si and Ge-ich SOI devices layers[A].:11-12. |
| [13] | Yee Chia yeo;Vivek Subramanian;Jakub Kedzierski et al.Nanoscale ultra-hin-ody silicon-n- insulator p-MOSFET with a SiGe/Si heterostructure channel[J].IEEE Transactions on Electron Devices,2000,21(04):161-163. |
| [14] | Wong H S P .Beyond the conventional transistor[EB/OL].http://www.research ibm com/journal/rd/462/wong html,2003. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%