报导了一种新型静电驱动扭转梁大位移微机械光开关微动作器的模拟、设计和制作.模拟结果表明,该微动作器的第一模态频率远低于第二模态,镜子的位移由梁的扭转引起.在32.8V的电压驱动下,上电极的前端位移是 69.6μ m,镜子的有效位移是 57μ m.测到第一模态频率是500Hz.利用本结构可成功地解决开关速度和大位移的矛盾.这样的位移足够使用 Corning OptiFocus Collimating Lensed Fiber来对准,从而获得低插入损耗.
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