提出并制作了转动竖直微镜的微机械光开关,采用曲线形状的电极设计,有效地减低了悬臂梁驱动器的吸合电压,采用体硅深刻蚀技术结合(110)硅的各向异性腐蚀技术制备了光开关芯片和耦合对准的U形槽和卡簧.芯片经初步封装后进行了电学测试和光学测试,测得吸合电压78.5V,谐振频率2.3kHz,光开关损耗5dB,隔离度45dB.
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