用导电原子力显微镜(AFM)针对宏观上绝缘,微观上由导电相sp2和绝缘相sp3混合的类金刚石(DLC)膜,进行表面改性的研究,尤其观察DLC膜表面施加电压前后形貌变化.实验表明,当直流电压加在针尖上,DLC膜形貌未发生变化,而电压施加在样品表面则出现明显纳米加工凹坑.解释了凹坑的"蝴蝶坑"形成原因;对DLC膜力电耦合实验表明,在一定临界压力之下,随针尖对样品作用力的加大,凹坑的深度随之增加.
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