研究了镍酸镧(分子式LaNiO3,简称LNO)导电薄膜的制备,及其与性能之间的关系.实验结果表明热处理制度和热处理过程中通氧是LNO薄膜获得良好电性能的关键.实验发现LNO薄膜在退火温度550℃时就已经晶化,并且随着退火温度的升高,薄膜电性能也随之提高,但是当温度高于860℃后,LNO薄膜发生了结构相变并伴有NiO的析出,因此导致了薄膜电阻率的升高.较短的预处理时间和较长的退火处理时间有助于薄膜晶粒的长大,从而提高薄膜的电性能.同时也讨论了LNO薄膜电阻率和工作温度的关系.
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