提出采用金刚石膜/硅复合材料作为MSGC基板的可行性.采用热丝辅助化学气相沉积(HFCVD)技术和相关退火工艺获得了金刚石膜/硅复合材料,并采用SEM、Raman光谱仪、微电流仪对复合材料的表面状况、结构、I-V和C-F特性进行了表征.结果表明,该复合材料经抛光后表面平整,退火后电阻率达2.9×10 10Ω·cm,电容值小且频率变化稳定,均满足MSGC对基板材料的要求,是一种应用前景极其广泛的MSGC衬底材料.
The diamond film/silicon composite material for micro- strip gas chambers (MSGC) was obtained by HFCVD and related annealing technology. SEM images, Raman spectrum, and electrical properties were investigated. The results indicate that the roughness of the composite substrate is rather the composite material is very small and almost has no variation with frequency. All these prove that diamond film/silicon composite material is a promising substrate for MSGC.
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