采用溶胶-凝胶(sol-gel)工艺分别在Pt/Ti/SiO2/Si和LNO/Si电极上制备Pb(Zr0.53Ti0.47)O3(PZT)铁电薄膜.研究了不同电极材料对PZT铁电薄膜的微结构及电性能的影响.(100)择优取向的PZT/LNO薄膜的介电性能和铁电性能较(111)/(100)取向的PZT/Pt薄膜略有下降,但在抗疲劳特性和漏电流特性方面都有了很大提高.PZT/LNO薄膜1010次极化反转后剩余极化几乎保持未变,直至1012次反转后,剩余极化仅下降了17%.
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