提出了一种新型的腔体式共面波导型微机械射频开关的结构,可动的金属/电介质的复合膜结构的共面波导既可作射频开关,同时也构成微波信号的传输路径.在普通电阻率(4-8Ω·cm)的硅片上,采用表面微机械加工技术制作出体积大小为:1000μm×600μm×300μm的射频开关,驱动电压为35V,在射频信号频率为50MHz到10GHz的范围内,该开关的插入损耗低于2dB,隔离度高于40dB.
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