利用热丝化学气相沉积(HFCVD)技术,通过逐次调整气压、碳源浓度等生长参数,沉积了晶粒尺寸逐层减小的多层式金刚石薄膜.场发射扫描电镜(FE-SEM)和原子力显微镜(AFM)测试显示其表层晶粒平均尺寸约为20nm,厚度和表面平均粗糙度分别为35.81μm和18.8nm(2μm×2μm),皆能满足高频声表面波器件用衬底的要求.实验结果表明,多层式生长方法是制备声表面波器件用金刚石衬底的理想方法.
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