采用SU-8结构释放并键合玻片制作了多层结构的微流体芯片,探讨了影响芯片气密性和沟道堵塞的因素,并通过荧光显示验证,提供了一种快速、低成本的塑性微流体器件制作方法.
参考文献
[1] | Manz A;Becker B.Microsystem Technology in Chemistry and Life Sciences[M].Berlin:Springer-Verlag,1999:3-4. |
[2] | Ivonne S;Reiner B;Johann M K.Miniaturized flowthrough PCR with different template types in a silicon chip thermocycler[J].Lab on a Chip,2001(01):42-49. |
[3] | Jeff C;Paul M;Ain S et al.A heater-integrated transparent microchannel chip for continuous-flow PCR[J].Sensors and Actuators B-Chemical,2002,84:283-290. |
[4] | Holger Becker;Laurie E. Locascio .Polymer microfluidic devices[J].Talanta: The International Journal of Pure and Applied Analytical Chemistry,2002(2):267-287. |
[5] | Steven A.Soper;Sean M.Ford;Shize Qi;Robin L.McCarley;Kevin Kelly;Michael C.Murphy .Polymeric Microelectromechanical Systems[J].Analytical chemistry,2000(19):642A-651A. |
[6] | Lena K;Malin S;Fredrik N et al.Fabrication of a paraffinactuator using hot embossing of PC[J].Sensors and Actuators A:Physical,2003,103:307-316. |
[7] | Teruo F.PDMS based microfluidic devices for biomedical applications[J].Microelectronic Engineering,2002(01):2975-2983. |
[8] | Dirk S;Jorg L;Hans-Dieter B et al.ArF-excimer laser ablation experiments on cycloolefin copolymer[J].Applied Surface Science,1999,150:161-165. |
[9] | Lawrence J;Li L .Modification of the wettability characteristics of polymethyl methacrylate (PMMA) by means of CO2,Nd:YAG,excimer and high power diode laser radiation[J].Materials Science and Engineering,2001,303:142-149. |
[10] | 张金娅,陈迪,朱军,李建华,方华斌,杨斌.超厚SU-8负胶高深宽比结构及工艺研究[J].功能材料与器件学报,2005(02):251-254. |
[11] | M.Agirregabiria;F.J.Blanco;J.Berganzo;M.T.Arroyo;K.Mayora .Fabrication of SU-8 multilayer microstructures based on successive CMOS compatible adhesive bonding and releasing steps[J].Lab on a chip,2005(5):545-552. |
[12] | Bohl B;Steger R;Zengerle R;Koltay P .Multi-layer SU-8 lift-off technology for microfluidic devices[J].Journal of Micromechanics and Microengineering,2005(6):1125-1130. |
[13] | Jackman RJ.;Ghodssi R.;Schmidt MA.;Jensen KF.;Floyd TM. .Microfluidic systems with on-line UV detection fabricated in photodefinable epoxy[J].Journal of Micromechanics and Microengineering,2001(3):263-269. |
[14] | Pan CT.;Yang H.;Shen SC.;Chou MC.;Chou HP. .A low-temperature wafer bonding technique using patternable materials[J].Journal of Micromechanics and Microengineering,2002(5):611-615. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%