通过改变生长参数,采用热丝化学气相沉积(HFCVD)法制备了从10μm到90nm四种晶粒尺寸的金刚石膜,并制作了三明治结构的光电导探测器.采用原子力显微镜和拉曼光谱仪研究了薄膜的结构和表面形貌:表面粗糙度从423nm变化到15nm;晶粒越大,金刚石膜的质量越好.I-V特性测试结果表明随着晶粒尺寸的减小,金刚石膜的电阻率从1011Ω·cm减小到106Ω·cm.在5.9 keV的55Fe X射线辐照下,随着晶粒尺寸的减小,探测器的信噪比(SNR)呈减小趋势.
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