以烧结B4C为靶材料、在氮离子束辅助下用脉冲激光沉积方法制备了三元化合物硼碳氮(BCN)薄膜.用X光电子谱和傅立叶变换红外谱方法表征了制备的薄膜.结果表明,膜层中包含B-C、N-C、B-N键等复合结构,以B-C-N原子杂化的形式结合成键,而并非各种成分的简单混合.还探讨了成膜过程和相关机理,离子束中的活性氮有效地和脉冲激光对B4C靶烧蚀产生的硼和碳结合成键,氮离子束的辅助还能在一定程度上抑制氧杂质进入膜层,给衬底适当加温有利于提高氮的含量并影响薄膜的化学结构.
参考文献
[1] | Watanabe MO.;Itoh S.;Mizushima K.;Sasaki T. .STRUCTURAL AND ELECTRICAL CHARACTERIZATION OF BC2N THIN FILMS[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1996(1/2):334-336. |
[2] | Popov C;Saito K;Ivanov B et al.Chemical vapour deposition of BC2N films and their laser-induced etching with SF6[J].Thin Solid Films,1998,312(1-2):99-105. |
[3] | Oliveira MN.;Conde O.;do Rego AMB. .XPS investigation of BxNyCz coatings deposited by laser assisted chemical vapour deposition[J].Surface & Coatings Technology,1998(1/3):398-403. |
[4] | Takashi Sugino;Haruhiko Hieda .Field emission characteristics of boron carbon nitride films synthesized by plasma-assisted chemical vapor deposition[J].Diamond and Related Materials,2000(3-6):1233-1237. |
[5] | Z. F. Zhou;I. Bello;M. K. Lei;K. Y. Li;C. S. Lee;S. T. Lee .Synthesis and characterization of boron carbon nitride films by radio frequency magnetron sputtering[J].Surface & Coatings Technology,2000(0):334-340. |
[6] | Lousa A;Esteve J;Muhl S et al.BCN thin films near the B4C composition deposited by radio frequency magnetron;sputtering[J].Diamond and Related Materials,2000,9(3-6):502-505. |
[7] | Pascual E. .Boron carbide thin films deposited by tuned-substrate RF magnetron sputtering[J].Diamond and Related Materials,1999(2 Mar):402-405. |
[8] | Laidani N.;Canteri R.;Elia L.;Luches A.;Martino M. Micheli V.;Speranza G.;Anderle M. .Structural and compositional study of B-C-N films produced by laser ablation of B4C targets in N-2 atmosphere[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(3):135-144. |
[9] | H. Ling;J.D. Wu;J. Sun;W. Shi;Z.F. Ying;F.M. Li .Electron cyclotron resonance plasma-assisted pulsed laser deposition of boron carbon nitride films[J].Diamond and Related Materials,2002(9):1623-1628. |
[10] | Perrone A.;Luches A.;Dinescu M.;Ghica C.;Sandu V. Andrei A.;Caricato AP. .Boron carbonitride films deposited by pulsed laser ablation[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,1998(4):239-242. |
[11] | Kunzle H;Gantenbein P;Steiner R et al.Deposition and characterization of thin boron-carbide coatings[J].Fresenius Journal of Analytical Chemistry,1993,346(1-3):41-44. |
[12] | Ong CW.;Chan KF.;Ng YM.;Chan PW.;Choy CL.;Kwok RWM.;Zhao XA. .EFFECTS OF CARBON INCORPORATION ON THE STRUCTURE AND MECHANICAL PROPERTIES OF CUBIC BORON NITRIDE FILMS[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(1/2):152-155. |
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