CaRuO3电极对(Ba,Sr)TiO3薄膜的介电特性的影响

功能材料与器件学报 , 2007, 13(3): 266-270. doi: 10.3969/j.issn.1007-4252.2007.03.014

CaRuO3电极对(Ba,Sr)TiO3薄膜的介电特性的影响

熊惠芳 ^1, , 唐新桂 ^2, , 易双萍 ^3, , 范仰才 ^4, , 蒋力立 ^5, , 陈王丽华 ^6,

1.广东工业大学物理与光电工程学院,广州,510090

2.广东工业大学物理与光电工程学院,广州,510090

3.广东工业大学物理与光电工程学院,广州,510090

4.广东工业大学物理与光电工程学院,广州,510090

5.广东工业大学试验中心,广州,510090

6.香港理工大学应用物理系,香港

基金项目: 广东省自然科学基金(05001825)

关键词：脉冲激光沉积 , 钛酸锶钡薄膜 , 异质结构 , 介电调谐率

Effects of CaRuO3 electrode on the dielectric properties of (Ba, Sr)TiO3 thin films

在Pt(111)/Ti/SiO2/Si(100)衬底上,用脉冲激光沉积工艺分别制备出了(110)外延取向生长的(Ba0.65Sr0.35)TiO3/CaRuO3(BST/CRO)异质结构薄膜;BST/CRO异质结构薄膜由纳米晶团簇组成,最大的团簇晶粒达500 nm,平均晶粒尺寸在60～80 nm,薄膜厚度为650 nm.BST/CRO异质结薄膜均为表面平滑和致密结构.BST/CRO异质结薄膜的介电常数和介电调谐率分别高达851和78.1%.与纯BST薄膜比较,用CRO作电极,增益介电常数与介电调谐率.

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材料期刊网

CaRuO3电极对(Ba,Sr)TiO3薄膜的介电特性的影响

Effects of CaRuO3 electrode on the dielectric properties of (Ba, Sr)TiO3 thin films

参考文献