高表面质量的pyrex玻璃对提高MEMS器件尤其是光学器件性能至关重要.本文采用TiW/Au+AZ4620厚胶作为多层复合刻蚀掩模,重点研究了玻璃湿法深刻蚀工艺中提高表面质量的方法,并分析了钻蚀和表面粗糙度产生的机理.结果表明,采用TiW/Au+AZ4620厚胶的多层掩膜比 TiW/Au掩膜能更有效地避免被保护玻璃表面产生针孔缺陷,减轻钻蚀.在纯HF中添加HCl,可以得到更光洁的刻蚀表面,当HF与HCl体积配比为10:1时,玻璃刻蚀面粗糙度由14.1nm减小为2.3nm.利用该工艺,成功实现了pyrex7740玻璃的150μm深刻蚀,保护区域的光学表面未出现钻蚀针孔等缺陷,同时完成了金属引线和对准标记的制作,为基于玻璃材料的MEMS器件制作提供了一种新的加工方法.
参考文献
| [1] | Coming公司 .Pyrex玻璃参数说明表[OL].http://www.corning.com/lightmaterials |
| [2] | 王阳元,武国英,郝一龙,张大成,肖志雄,李婷,张国炳,张锦文.硅基MEMS加工技术及其标准工艺研究[J].电子学报,2002(11):1577-1584. |
| [3] | Bu MQ;Melvin T;Ensell GJ;Wilkinson JS;Evans AGR .A new masking technology for deep glass etching and its microfluidic application[J].Sensors and Actuators, A. Physical,2004(2/3):476-482. |
| [4] | Corman T.;Stemme G.;Enoksson P. .Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask[J].Journal of Micromechanics and Microengineering,1998(2):84-87. |
| [5] | 汤扬华,周兆英,叶雄英,冯焱颖,金亚.毛细管电泳芯片的制造[J].微细加工技术,2001(01):62-66. |
| [6] | Axel Grosse;Matthias Grewe;Henning Fouckhardt .Deep wet etching of fused silica glass for hollow capillary optical leaky waveguides in micmfluidic devices[J].Journal of Micromechanics and Microengineering,2001,11:257-262. |
| [7] | Gretillat MA.;Thiebaud P.;Roth S.;Koudelkahep M.;Derooij NF.;Paoletti F. .A NEW FABRICATION METHOD FOR BOROSILICATE GLASS CAPILLARY TUBES WITH LATERAL INLETS AND OUTLETS[J].Sensors and Actuators, A. Physical,1997(1/3):219-222. |
| [8] | Thierry Corman;Peter Enoksson;Goran Stemme.Deep wet etching of borosilieate glass using an anodically bonded silicon substrate as mask[J].Journal of Micromechanics and Microengineering,1998(08):84-87. |
| [9] | Iliescu C;Miao JM;Tay FEH .Stress control in masking layers for deep wet micromachining of Pyrex glass[J].Sensors and Actuators, A. Physical,2005(2):286-292. |
| [10] | Tom McCreedy .Rapid prototyping of glass and PDMS microstructures for micro total analytical systems and micro chemical reactors by microfabrication in the general laboratory[J].Analytica chimica acta,2001(1):39-43. |
| [11] | 殷学锋,方群,凌云扬.微流控分析芯片的加工技术[J].现代科学仪器,2001(04):10-14. |
| [12] | 周健,闫桂珍.Pyrex玻璃的湿法刻蚀研究[J].微细加工技术,2004(04):41-44. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%