ZnO薄膜是最早发现有良好气敏特性,并且也是最早(1962)被提出用它来研制气敏元件的金属氧化物气敏基材料;然而近半个世纪以来没有实现.最近通过用粉末溅射解决气敏层的掺杂稳定性;通过选择合适的绝缘衬底(Al2O3)和适当选择溅射参数得到掺杂稳定,结构稳定,性能良好的ZnO薄膜酒敏元件.通过对芯片和接线柱的超声双点焊获得超小型悬挂式的气敏元件,并用它做出可检测100ppm和500ppm两种酒气浓度的报警器.
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