根据介观压阻效应原理以及柱体声学理论,提出了一种基于量子阱薄膜的纳机电矢量水听器,期望利用量子阱薄膜材料的高灵敏度压阻效应以及水听器精巧的微结构,提高矢量水听器的灵敏度,实现水听器的低频特性及结构微小型化.首先概括地描述了介观压阻效应原理以及柱体声学理论;完成了水听器的结构设计;采用GaAs基微机械加工工艺完成了水听器的加工并对水听器进行了封装,最后对研制出的水听器的性能指标进行了测试,测试结果表明:纳机电矢量水听器不但体积小、质量轻、结构简单,而且能够获取水下声场的质点振动信息,具有"8字型"的指向性,可进行水下声信号的定位探测.
参考文献
| [1] | Wen TD.;Anastassakis E. .TEMPERATURE DEPENDENCE OF STRAINS AND STRESSES IN UNDERCRITICAL CUBIC SUPERLATTICES AND HETEROJUNCTIONS[J].Physical Review.B.Condensed Matter,1996(8):4741-4751. |
| [2] | Wen TD.;Anastassakis E.;Xu LP. .On the piezoelectric signals of multilayer systems[J].Physica Status Solidi, A. Applied Research,2000(2):467-475. |
| [3] | 温廷敦,张文栋.介观压阻效应[J].微纳电子技术,2003(07):41-43. |
| [4] | 陈丽洁,杨士莪.压阻式新型矢量水听器设计[J].应用声学,2006(05):273-278. |
| [5] | 孙贵青,杨德森,张揽月.基于矢量水听器的水下目标低频辐射噪声测量方法研究[J].声学学报,2002(05):429-434. |
| [6] | Fobelets K;Vounckxt R;Borghs G .A GaAs pressure sensor based on resonant tunnel diodes[J].Journal of Micromechanics and Microengineering,1994,4:123-128. |
| [7] | Shehurov V A .The interaction of energy flows of underwater ambient noise and local source[J].Journal of the Acoustical Society of America,1991,90(04):1002-1004. |
| [8] | Moffett Mark B .A piezoelectric flexural -disk neutrally buoyant underwater aecelerometer[J].Journal of the Acoustical Society of America,1998,45(01):1346-1351. |
| [9] | Amarasinghe R;Dao D V;Toriyama T et al.Design and Fabrication of a Miniaturized Six-Degree-of-Freedom Piezoresistive Accelerometer[J].Journal of Micromechanics and Microengineering,2005,15:1745-1753. |
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