多晶硅双端固支梁是MEMS器件中最常用的组件之一,它的疲劳特性直接关系到器件的寿命及安全性.本文针对多晶硅微梁结构进行疲劳可靠性测试,在对其施加循环静电激励后,测试了它的频率变化特性.并分析了频率向高频移动的原因,从而说明了梁的疲劳特性.
参考文献
| [1] | Seyed M. Allameh;Pranav Shrotriya;Alex Butterwick;Stuart B. Brown;Wole O. Soboyejo .Surface topography evolution and fatigue fracture in polysilicon MEMS structures[J].Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems,2003(3):313-324. |
| [2] | C. L. Muhlstein;E. A. Stach;R. O. Ritchie .Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical systems[J].Applied physics letters,2002(9):1532-1534. |
| [3] | Kahn H;Ballarini R;Bellante J et al.Fatigue Failure in Polysilicon not Due to Simple Stress Corrosion Cracking[J].Science,2002,298:1215-1222. |
| [4] | C. L. Muhlstein;E. A. Stach;R. O. Ritchie .A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading[J].Acta materialia,2002(14):3579-3595. |
| [5] | Muhlstein CL.;Ritchie RO.;Brown SB. .High-cycle fatigue and durability of polycrystalline silicon thin films in ambient air[J].Sensors and Actuators, A. Physical,2001(3):177-188. |
| [6] | Hergen Kapels;Robert Aigner;Josef Binder .Fracture strength and fatigue of polysilicon determined by a novel thermal actuator[J].IEEE Transactions on Electron Devices,2000(7):1522-1528. |
| [7] | Nicua L;Bergaud C .Experimental and theoretical investigations on nonlinear resonances of composite buckled microbridges[J].,1999,86:5835-5841. |
| [8] | 吴昊,孟永钢,苏才钧,郭占社,温诗铸.多晶硅薄膜疲劳特性片外测试方法[J].哈尔滨工业大学学报,2006(04):592-594,656. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%