由于MEMS器件的可靠性成为MEMS产品商业化过程中一个重要问题,而冲击断裂是导致器件失效的一个重要原因.本文主要研究多晶硅微悬臂梁在冲击条件下的可靠性,文中阐述了断裂失效机理,并使用应力一强度模型对可靠度进行建模.通过实验统计在各种加速度冲击下的可靠度,并将实验实测值与理论值进行对比.
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