提出了一种简易的基于SU8和PMMA的电泳芯片的制作方法,研究了PMMA基底上SU8胶微管道的光刻和薄膜微电极的lift-off制作工艺,探讨了PMMA材料特性对薄膜微电极和SU8胶光刻的影响,通过热压方法完成芯片的键合封装,实现了一种快速、高质量的电泳芯片制作工艺,同时与电泳芯片的UV-LIGA工艺具有很好的兼容性.
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