本文介绍了一种MEMS悬臂梁器件,将环境中的振动机械能转化为电能.该悬臂梁的主体材料为单晶硅,其上覆盖一层用Sol-Gel法制备的PZT压电材料,利用压电材料的正压电效应实现机电能量的转换.论文给出了悬臂梁式振动能量收集器的一个简单理论模型.器件采用(110)硅基片,有利于通过湿法腐蚀制备质量块.质量块可以用来降低器件的谐振频率,并提高输出电功率.尺寸参数为3600μm×270 μm的器件样品的测试结果表明,在其谐振频率1673Hz,振幅为11nm的振动条件下,该器件的最大输出功率大于1nW,即0.11 μW/cm2.
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