提出了一种新的压力传感器,该传感器基于Fabry-Perot腔干涉和相位解调理论测量压力.设计用MEMS技术以及普通的光通讯接插件制作出工艺简单,分辨率高的光纤MEMS压力传感器.阐述了传感器的工作原理,分析了硅膜的厚度对传感器性能的影响以及FP腔的长度对反射光信号的影响.研究了基于相位解调法的傅里叶变换方法,傅里叶解调法受光源强度波动的影响较小,解调精度高.实验结果表明改传感器在[0-3]MPa测量范围内,线性好,灵敏度可达到3.50 m/MPa(腔长改变/压力).
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