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本研究在硅片上制作了有平面电极的微型电液动力泵并进行了实验研究.微泵由一组平面电极组成,施加直流电压驱动液体流动.分别采用HFE7100和无水乙醇作为工作流体进行了静压头测试.使用HFE7100时最高可以得到1050Pa的压头.

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