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ZnO半导体是宽带隙半导体领域中继GaN和SiC之后的研究热点.同时,作为一种氧化物半导体,ZnO半导体在能带结构、晶格缺陷、抗辐照特性以及电学性质等方面具有特殊性,已有的研究中还存在一些不同的认识.本工作在阐述ZnO的晶体结构和基本性质基础之上,对其能带结构和缺陷特征、电子输运以及P型掺杂等主要的半导体特性研究现状进行了较为全面综述和分析.由于ZnO半导体具有高的激子束缚能、优良的电子输运性质、强抗辐照特性以及低成本和环境友好等显著特征,它是未来半导体光电子领域极具应用潜力的新一代宽带隙半导体材料,但是到目前为止,p型掺杂技术仍然是ZnO半导体器件面临的最大挑战.

参考文献

[1] Hvam J M .Temperature-induced wavelength shift of electron-beam-pumped lasers from CdSe,CdS and ZnO[J].Physical Review B,1971,4(12):4459-4464.
[2] Reynolds DC.;Jogai B.;Look DC. .OPTICALLY PUMPED ULTRAVIOLET LASING FROM ZNO[J].Solid State Communications,1996(12):873-875.
[3] Look DC. .Recent advances in ZnO materials and devices[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2001(1/3):383-387.
[4] Segawa Y.;Kawasaki M.;Koinuma H.;Tang ZK.;Yu P.;Wong GKL.;Ohtomo A. .GROWTH OF ZNO THIN FILM BY LASER MBE - LASING OF EXCITON AT ROOM TEMPERATURE[J].Physica status solidi, B. Basic research,1997(2):669-672.
[5] Zu P.;Wong GKL.;Kawasaki M.;Ohtomo A.;Koinuma H.;Segawa Y.;Tang ZK. .ULTRAVIOLET SPONTANEOUS AND STIMULATED EMISSIONS FROM ZNO MICROCRYSTALLITE THIN FILMS AT ROOM TEMPERATURE[J].Solid State Communications,1997(8):459-463.
[6] Will UV .Lasers Beat the Blues[J].Science,1997,276:895.
[7] Park Y S;Reynolds D C .Growth of ZnO single crystals[J].Journal of Applied Physics,1967,38(02):756-760.
[8] Jeff E Nause .ZnO broadens the spectrum[J].Ⅲ-Vs Review,1999,12(04):28-31.
[9] D. C. Reynolds;C. W. Litton;D. C. Look;J. E. Hoelscher;B. Claflin;T. C. Collins;J. Nause;B. Nemeth .High-quality, melt-grown ZnO single crystals[J].Journal of Applied Physics,2004(9):4802-4805.
[10] Tang ZK.;Yu P.;Kawasaki M.;Ohtomo A.;Koinuma H.;Segawa Y.;Wong GKL. .Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films[J].Applied physics letters,1998(25):3270-3272.
[11] Chen YF.;Yao TF.;Bagnall D. .ZnO as a novel photonic material for the UV region[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2000(2/3):190-198.
[12] Ko HJ.;Hong SK.;Yao TF.;Chen YF. .MBE growth of high-quality ZnO films on epi-GaN[J].Journal of Crystal Growth,2000(4):816-821.
[13] Xiaotian Yang;Guotong Du;Xinqiang Wang;Jinzhong Wang;Boyang Liu;Yuantao Zhang;Dan Liu;Dali Liu;H.C. Ong;Shuren Yang .Effect of post-thermal annealing on properties of ZnO thin film grown on c-Al_2O_3 by metal-organic chemical vapor deposition[J].Journal of Crystal Growth,2003(1/3):275-278.
[14] Tsukazaki A;Ohtomo A;Yoshida S et al.Layer-by-layer growth of high-optical-quality ZnO film on atomically smooth and lattice relaxed ZnO buffer layer[J].Applied Physics Letters,2003,83(14):2784-2786.
[15] Bing Guo;Zhizhen Ye;K.S. Wong .Time-resolved photoluminescence study of a ZnO thin film grown on a (100) silicon substrate[J].Journal of Crystal Growth,2003(1/4):252-257.
[16] Nick M.Sbrockey;Joseph D. Cuchiaro;Brent H.Hoerman;L.Gary Provost;Catherine E.Rice;Shangzhu Sun;Gary S.Tompa;Shanthi Ganesan;Jeff Nause;William B. Nemeth .ZnO thin films by MOCVD[J].III-Vs review,2004(7):23-25.
[17] S.Liang;H.Sheng;Y.Liu .ZnO Schottky ultraviolet photodetectors[J].Journal of Crystal Growth,2001(2/4):110-113.
[18] Basak D;Amin G;Mallik B et al.Photoconductive UVderectors on sol-gel-synthesized ZnO films[J].Journal of Crystal Growth,2003,256:73-77.
[19] Ohtomo A.;Koida T.;Masubuchi K.;Koinuma H.;Sakurai Y. Yoshida Y.;Yasuda T.;Segawa Y.;Kawasaki M. .MgxZn1-xO as a II-VI widegap semiconductor alloy[J].Applied physics letters,1998(19):2466-2468.
[20] Chen J.;Shen WZ.;Chen NB.;Qiu DJ.;Wu HZ. .The study of composition non-uniformity in ternary MgxZn1-xO thin films[J].Journal of Physics. Condensed Matter,2003(30):L475-L482.
[21] T. Makino;Y. Segawa;M. Kawasaki;A. Ohtomo;R. Shiroki;K. Tamura;T. Yasuda;H. Koinuma .Band gap engineering based on Mg_(x)Zn_(1-x)O and Cd_(y)Zn_(1-y)O ternary alloy films[J].Applied physics letters,2001(9):1237-1239.
[22] Sharma A K;Narayan J;Muth J F et al.Optical and structural properties of epitaxial MgxZn1-xO alloys[J].Applied Physics Letters,75(21):3327-3329.
[23] Ryu YR.;Look DC.;Wrobel JM.;Jeong HM.;White HW.;Zhu S. .Synthesis of p-type ZnO films[J].Journal of Crystal Growth,2000(1/4):330-334.
[24] Toru Aoki;Yoshinori Hatanaka;David C. Look .ZnO diode fabricated by excimer-laser doping[J].Applied physics letters,2000(22):3257-3258.
[25] Look D C;Reynolds D C;Litton C W et al.Characterization of homoepitaxial p-type ZnO grown by Molecular beam epitaxy[J].Applied Physics Letters,2002,81(10):1830-1832.
[26] Atsushi Tsukazaki;Akira Ohtomo;Takeyoshi Onuma;Makoto Ohtani;Takayuki Makino;Masatomo Sumiya;Keita Ohtani;Shigefusa F.Chichibu;Syunrou Fuke;Yusaburou Segawa;Hideo Ohno;Hideomi Koinuma;Masashi Kawasaki .Repeated temperature modulation epitaxy for p-type doping and light-emitting diode based on ZnO[J].Nature materials,2005(1):42-46.
[27] Albrecht J D;Ruden P P;Limpijumnong S et al.High field electron transport properties of bulk ZnO[J].Journal of Applied Physics,1999,86(12):6864-6867.
[28] Look DC.;Sizelove JR.;Hemsky JW. .Residual native shallow donor in ZnO[J].Physical review letters,1999(12):2552-2555.
[29] D. C. Look;D. C. Reynolds;J. W. Hemsky .Production and annealing of electron irradiation damage in ZnO[J].Applied physics letters,1999(6):811-813.
[30] C Coskun;D C Look;G C Farlow;J R Sizelove .Radiation hardness of ZnO at low temperatures[J].Semiconductor Science and Technology,2004(6):752-754.
[31] Muth J F;Teng C W;Sharmal A K et al.Growth of ZnO/ MgZnO Superlattice on Sapphire[J].Materials Research Society Symposium Proceedings,2000,617:J6.7.1-J6.7.7.
[32] A. Ohtomo;M. Kawasaki;I. Ohkubo .Structure and optical properties of ZnO/Mg_(0.2)Zn_(0.8)O superlattices[J].Applied physics letters,1999(7):980-982.
[33] H. D. Sun;T. Makino;N. T. Tuan .Stimulated emission induced by exciton-exciton scattering in ZnO/ZnMgO multiquantum wells up to room temperature[J].Applied physics letters,2000(26):4250-4252.
[34] Sun H D;Makino T;Segawa Y et al.Enhancement of exeiton binding energies in ZnO/ZnMgO malfiquantum wells[J].Applied Physics Letters,2002,91(04):1993-1997.
[35] Dae-Kue Hwang;Soon-Hyung Kang;Jae-Hong Lira et al.p-ZnO/n-GaN heterostructure ZnO light-emitring diodes[J].Applied Physics Letters,2005,86:222101.
[36] Norton DP .Synthesis and properties of epitaxial electronic oxide thin-film materials[J].Materials Science & Engineering, R. Reports: A Review Journal,2004(5/6):139-247.
[37] Robert W C;Melvin A J;William B H.CRC Handbook of Chemistry and Physics[M].Florida:CRC Press,Inc,1993:95-100.
[38] Teng Chia-Wei .Optical characterization of wide band gap semiconductuors and nanostructures[D].North Carolina State University,2000.
[39] Choopun S .ZnO wide band gap semiconductor for optoelectronic devices[D].University of Michigan,2001.
[40] Reynolds DC.;Jogai B.;Litton CW.;Cantwell G.;Harsch WC.;Look DC. .Valence-band ordering in ZnO[J].Physical Review.B.Condensed Matter,1999(4):2340-2344.
[41] Walter R L Larnbrecht;Anna V Rodina;Sukit Limpijumnong et al.Valence-band ordering and magneto-optic exciton fine structure in ZnO[J].Physical Review B,2002,65:075207.
[42] Paul H Kasai .Electron spin resonance studies of donors and acceptors in ZnO[J].Physical Review,1963,130(03):989-995.
[43] Hagemark K I .Defects in ZnO[J].Journal of Solid State Chemistry,1976,16:293.
[44] Hutson A R .Hall Effect Studies of Doped Zinc Oxide Single Crystals[J].Physical Review,1967,108:222-230.
[45] 徐毓龙.氧化物与化合物半导体基础[M].西安:西安电子科技大学出版社,1991:105-110.
[46] Kroger F A.The chemistry of imperfect crystals[M].Amsterdam:North-Holland Publishing Company,1964:691-710.
[47] Mahan G D .Intrinsic defects in ZnO varistors[J].Journal of Applied Physics,1983,54(07):3825-3832.
[48] Kohan A F;Coder G;Morgan D et al.First-principles study of native point defects in ZnO[J].Physical Review B,2000,61(22):15021.
[49] Oba F.;Isotani S.;Adachi H.;Tanaka I.;Nishitani SR. .Energetics of native defects in ZnO[J].Journal of Applied Physics,2001(2):824-828.
[50] Van de Walle CG. .Hydrogen as a cause of doping in zinc oxide[J].Physical review letters,2000(5):1012-1015.
[51] Cox SFJ.;Cottrell SP.;King PJC.;Lord JS.;Gil JM.;Alberto HV.;Vilao RC.;Duarte JP.;de Campos NA.;Weidinger A.;Lichti RL. Irvine SJC.;Davis EA. .Experimental confirmation of the predicted shallow donor hydrogen state in zinc oxide[J].Physical review letters,2001(12):2601-2604.
[52] Cetin Kilic;Alex Zunger .n-type doping of oxides by hydrogen[J].Applied physics letters,2002(1):73-75.
[53] F. D. Auret;S. A. Goodman;M. Hayes;M. J. Legodi;H. A. van Laarhoven;D. C. Look .Electrical characterization of 1.8 MeV proton-bombarded ZnO[J].Applied physics letters,2001(19):3074-3076.
[54] S. O. Kucheyev;C. Jagadish;J. S. Williams;P. N. K. Deenapanray;Mitsuaki Yano;Kazuto Koike;Shigehiko Sasa;Masataka Inoue;Ken-ichi Ogata .Implant isolation of ZnO[J].Journal of Applied Physics,2003(5):2972-2976.
[55] Look DC.;Sizelove JR.;Jones RL.;Litton CW.;Cantwell G. Harsch WC.;Reynolds DC. .Electrical properties of bulk ZnO[J].Solid State Communications,1998(6):399-401.
[56] A. Ohtomo;K. Tamura;K. Saikusa;K. Takahashi;T. Makino;Y. Segawa;H. Koinuma;M. Kawasaki .Single Crystalline ZnO films grown on lattice-matched ScAlMgO_4 (0001) substrates[J].Applied physics letters,1999(17):2635-2637.
[57] Tsukazaki A;Ohtomo A;Kawasaki M .High-mobility electronic transport in ZnO thin films[J].Applied Physics Letters,2006,88:152106.
[58] S. B. Zhang;S.-H. Wei;A. Zunger .Overcoming doping bottlenecks in semiconductors and wide-gap materials[J].Physica, B. Condensed Matter,1999(0):976-980.
[59] Zhang SB.;Zunger A.;Wei SH. .Intrinsic n-type versus p-type doping asymmetry and the defect physics of ZnO - art. no. 075205[J].Physical Review.B.Condensed Matter,2001(7):075205-1-075205-7.
[60] Fei Zhuge .Preparation of Al-N codoped p-type ZnO thin films and fabrication of ZnO p-n homojunctions[OL].中国期刊网,2005.
[61] Park C H;Zhang S B;Wei Su-Huai .Origin of p-type doping difficulty in ZnO:The impurity perspective[J].Physical Review B,2001,66:073202.
[62] Xin-Li Guo;Hitoshi Tabata;Tomoji Kawai .p-Type conduction in transparent semiconductor ZnO thin films induced by electron cyclotron resonance N_2O plasma[J].Optical materials,2002(1):229-233.
[63] Properties of arsenic-doped p-type ZnO grown by hybrid beam deposition[J].Applied physics letters,2003(1):87-89.
[64] Realization of p-type ZnO thin films via phosphorus doping and thermal activation of the dopant[J].Applied physics letters,2003(1):63-65.
[65] Look DC;Renlund GM;Burgener RH;Sizelove JR .As-doped p-type ZnO produced by an evaporation/sputtering process[J].Applied physics letters,2004(22):5269-5271.
[66] Limpijumnong S;Zhang S B;Su-Huai Wei et al.Do.ping by Large-Size-Mismatched Impurities:The Microscopic Orion of Arsenicor Antimony-Doped p-Type Zinc Oxide[J].Physical Review Letters,2004,92(15):155504.
[67] Ryu Y R;Lee T-S;Lubguban J A et al.Next generation of oxide photonic devices:ZnO -based ultraviolet light emitting diodes[J].Applied Physics Letters,2006,88:241108.
[68] Ryu Y R;Lubguban J A;Lee T-S et al.Excitonic ultraviolet lasing in ZnO-based light emitting devices[J].Applied Physics Letters,2007,90:131115.
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