采用石英晶体微天平传感器电极上旋涂纳米氧化锌薄膜,构造湿度传感敏感元件,实现对湿度检测.介绍了检测系统的组成,纳米氧化锌的制备.通过DAQ数据采集卡和Labview软件实现数据的实时采集.实验结果表明旋涂纳米氧化锌薄膜的传感器频率随测试的相对湿度变化明显,用纳米氧化锌作为敏感元件检测湿度具有很高的灵敏度和重复性.
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