分析了悬浮转子式微陀螺基本原理、技术技术要害,并综述了悬浮转子微陀螺多种方案的最新研究进展.
参考文献
| [1] | Shearwood C.;Williams C.B.;Mellor P.H.;Yates R.B.;Gibbs M.R.J.;Mattingley A.D. .Levitation of a micromachined rotor for application in a rotatinggyroscope[J].Electronics Letters,1995(21):1845-1846. |
| [2] | Williams CB.;Mellor PH.;Yates RB.;Shearwood C. .MODELLING AND TESTING OF A FRICTIONLESS LEVITATED MICROMOTOR[J].Sensors and Actuators, A. Physical,1997(1/3):469-473. |
| [3] | 株式会社トキメツク .開発が進むマルチ于出力マィク口慣性セソサ(MESAG).(MESAG)[OL].http://www.tokimec.co.jp/sensor/index.html,2003-08-25. |
| [4] | Kraft M.;Evans AGR.;Farooqui MM. .Modelling and design of an electrostatically levitated disc for inertial sensing applications[J].Journal of Micromechanics and Microengineering,2001(4):423-427. |
| [5] | Torti R;Gondhalekar V;Tran H.Electrostatically suspended and sensed micromechanical rate gyroscope[A].,1994:27-38. |
| [6] | ZHANG Wei-ping,CHEN Wen-yuan,WU Xiao-sheng,ZHAO Xiao-lin,CUI Feng,HUANG Xiao-gang,LIU Wu.磁悬浮转子微陀螺的设计技术[J].光学精密工程,2004(z1):1-5. |
| [7] | 崔峰,苏宇锋,张卫平,吴校生,陈文元,赵小林.静电悬浮转子微陀螺及其关键技术[J].中国惯性技术学报,2005(06):61-67. |
| [8] | Weiping Zhang;Wenyuan Chen;Xiaolin Zhan.The study of an electromagnetic levitating micromotor for application in a rotating gyroscope[J].Sensors and Actuators A:Physical,2006 |
| [9] | Houlihan R;Kukharenka A;Gindila M.Analysis and design of a capacitive aeeelerometer based on a electrostatically levitated miero -disk[A].,2001:277-286. |
| [10] | Kraft M;Evans A.System level simulation of an electrostatieeally levitated disk[A].San Diego,California,USA,2000:130-133. |
| [11] | Houlihan R;Kraft M .Modeling of an accelerometer based on a levitated proof mass[J].Journal of Micromechanics and Microengineering,2002,12(04):493-503. |
| [12] | Nakamura S;Tochigi Y.MEMS inertial sensor toward higher accuracy & multi-axis sensing[J].IEEE Sensors Journal,2005:939-942. |
| [13] | X.-S. Wu;W.-Y. Chen;X.-L. Zhao;W.-P. Zhang .Micromotor with electromagnetically levitated rotor using separated coils[J].Electronics Letters,2004(16):996-997. |
| [14] | Murakoshi T;Fukatsu K;Nakamura S et al.Electrostatically levitated ring-shaped rotational gyro/accelerometer[J].Japanese Journal of Applied Physics,2003,42:2468-2472. |
| [15] | Keisuke F;Takao M;Satoshi K .Acceleration detection type gyro device[P].EP 1275934,2003-01-15. |
| [16] | Kukharenka E;Farooqui M M;Grigore L et al.Electro-plating moulds using dry film thick negative photoresist[J].Journal of Micromechanics and Microengineering,2003,13:S67-S74. |
| [17] | F. Cui;W.-Y. Chen;X.-L. Zhao;X.-M. Jing;X.-S. Wu .Metal foundation construction to consolidate electroplated structures for successful removal of SU-8 mould[J].Electronics Letters,2006(12):690-691. |
| [18] | Dinesh J Alladi.An IC for closed-loop control of a micromotor with an electrostatically levitated rotor.Circuits and Systems[A].,1999:489-492. |
| [19] | Henmi H;shoji S;Shoji Y et al.Vacuum packaging for micmsensors by glass -silicon anodicbonding[J].Sensors and Actuators A:Physical,43:243-248. |
| [20] | 张卫平;陈文元 等.高温超导稳悬永磁转子微陀螺[P].CN 10027930.7,2005. |
| [21] | 张卫平;陈文元 等.磁场可控介磁稳定悬浮转子微陀螺[P].CN 10110656.X,2005. |
| [22] | 张卫平;陈文元 等.永磁介磁组合悬浮转子微陀螺[P].CN 10110655.5,2005. |
| [23] | Shearwood C.;Williams CB.;Gong H.;Ho KY. .Development of a levitated micromotor for application as a gyroscope[J].Sensors and Actuators, A. Physical,2000(1/3):85-92. |
| [24] | 张卫平;陈文元 等.主动悬浮永磁环形转子异步感应微机械陀螺陀螺仪[P].CN 10027406.4,2006. |
| [25] | 张卫平;陈文元 等.软磁吸悬高速旋转刚体微陀螺[P].CN 10027336.8,2005. |
| [26] | Charles R Dauwalter.A high performance magnetically suspended MEMS spinning wheel gyro[A].,2004:70-77. |
| [27] | Dauwalter C.R.;Ha J.C. .Magnetically suspended MEMS spinning wheel gyro[J].IEEE Aerospace and Electronic Systems Magazine,2005(2):21-26. |
| [28] | Charles R Dauwalter .Magnetic actuator and position control system[P].US 5959382 |
| [29] | Nakaishi T;Hojo T;Murakoshi T et al.Method of making a gyro apparatus[P].US 5781985,1998. |
| [30] | Hawkey T et al.Eletrostatically controlled micromeehanical gyroscope[P].US 5353656,1994. |
| [31] | 従来の設計思想の常識に挑んだウェアラェアラブルなマイクロ惯性セソサ特集マィクロマツニソクヘの期待[A].:6-7. |
| [32] | Esashi M.Saving energy and natural resource by micro-nanomachinng[A].,2002:220-227. |
| [33] | 张卫平 等.静电支撑悬浮电磁感应旋转微陀螺[P].CN 10028646.6,2006. |
| [34] | Masayoshi Esashi,Takahito Ono.用体硅微加工工艺实现的微纳电械系统[J].光学精密工程,2002(06):608-613. |
| [35] | Gindila M V;Kraft M .Electronic interface design for an electrically floating micro-disk[J].,2003,13:S11-S16. |
| [36] | 陈文元;崔峰;赵小林 等.静电悬浮转子微惯性传感器及制造方法[P].CN 10018474.5,2004. |
| [37] | 张卫平;陈文元;赵小林 等.利用静电荷和电荷弛豫工作的悬浮转子MEMS微陀螺[P].CN 10018015.7,2004. |
| [38] | Tocla R;Takeda M;Murakoshi T.electrostatieally levitated spherical 3-axis accelerometer[A].,2002:710-713. |
| [39] | 陈文元;刘武;张卫平 .抗磁性悬浮永磁转子微加速度计[P].CN 10025872.9,2006. |
| [40] | 张卫平 等.反磁悬浮静电驱动微型陀螺仪[P].CN 10038292.8,2007. |
| [41] | 张卫平 等.反磁转子电磁感应驱动微型陀螺仪[P].CN 10038294.7,2007. |
| [42] | 张卫平 等.悬浮式反磁质量微型加速度计[P].CN 10038293.2,2007. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%