采用了H3PO4/H2O2系化学腐蚀液对GSMBE外延的InGaAs/InP和InAIAs/InP材料湿法腐蚀特性进行了研究,研究了不同浓度和配比对于腐蚀速率和形貌影响.结果表明该腐蚀液体系具有良好的均匀性,腐蚀速率随浓度呈指数关系,表面形貌基本不受浓度影响.在增加腐蚀液中双氧水含量时,腐蚀速率先增大后减小,表面形貌良好;增加磷酸浓度腐蚀速率亦有增大趋势,表面出现尖锥状小丘.并对腐蚀液配比变化对腐蚀特性影响及腐蚀机理进行了讨论分析.
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