用溶胶一凝胶方法在LaNiO3底电极上制备了500℃退火的BiFeO3薄膜.研究了室温下薄膜的结构,介电与铁电性质和漏电流性质.XRD研究表明薄膜呈R3m结构,没有观察到不纯相.铁电性研究表明,薄膜具有大的剩余极化强度,在600 kV/cm的测试电场下,薄膜的剩余极化强度为20uC/cm2,矫顽场为440 kV/cm.介电性质研究表明,在整个测试频率范围内,薄膜具有小的介电损耗.而漏电流特性测试表明,通过工艺的改进,有效的限制了BiFeO3薄膜的漏电流.
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