基于原子力显微技术的PZT微阵列图形铁电性能

功能材料与器件学报 , 2008, 14(5): 919-922. doi: 10.3969/j.issn.1007-4252.2008.05.013

基于原子力显微技术的PZT微阵列图形铁电性能

徐国敏 ^1, , 赵高扬 ^2, , 张卫华 ^3, , 邓小翠 ^4, , 谭红 ^5, , 何力 ^6,

1.西安理工大学材料科学与工程学院,西安,710048;国家复合改性聚合物材料工程技术研究中心,贵阳,550014

2.西安理工大学材料科学与工程学院,西安,710048

3.西安理工大学材料科学与工程学院,西安,710048

4.西安理工大学材料科学与工程学院,西安,710048

5.国家复合改性聚合物材料工程技术研究中心,贵阳,550014

6.国家复合改性聚合物材料工程技术研究中心,贵阳,550014

基金项目: 国家重点基础研究发展规划(973计划)前期研究专项(2003CCA03300) 陕西省西安市科技计划(XA-AM-200611)

关键词：锆钛酸铅 , 铁电薄膜 , 电滞回线 , 微细图形

Measurement of ferroelectric properties of PZT fine patterns by AFM technique

应用基于原子力显微镜与铁电分析仪联用的方法,在无顶电极的情况下,直接测试了PZT微阵列格点的电滞回线.结果表明,应用铁电分析仪与原子力显微镜联用的测试技术能够表征铁电电容的电滞回线,并且可以定性地评价薄膜微电容的铁电特性.

参考文献

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基于原子力显微技术的PZT微阵列图形铁电性能

Measurement of ferroelectric properties of PZT fine patterns by AFM technique

参考文献